|
Item |
Description/品名 |
MODEL/型號 |
Maker Part No. |
Stock Qty |
|
1 |
SHINKO
Vacuum Robot blade |
Robot model : SBX92302226-2 |
N/A |
1 |
|
2 |
Yaskawa Robot Controller |
XU-CN1170A |
0190-23873 |
1 |
|
3 |
AMAT
ROBOT aligner Driver |
YASKAWA XU-BCD2081D |
0190-14741 |
1 |
|
4 |
Yaskawa Wafer Pre-aligner |
XU-ACP4861 |
0190-19918 |
1 |
|
5 |
TDK
TAS-MAIN Rev.5.30B Board TAS-CPU Rev.2.20
|
|
|
1 |
|
6 |
TDK
Load Port |
TDK
TAS300 |
0190-25960-002 |
1 |
|
7 |
SHINKO Vacuum Robot |
SBX92302226-2 |
NA |
2 |
|
8 |
SHINKO Load Port |
SELOP12F25-501 |
NA |
2 |
|
9 |
SMC high vacuum valve |
XLD-80L-M9BA-XS1A |
NA |
3 |
|
10 |
SLIT VALVE high vacuum gate valve) |
SMC XGT312-50336-3F-X486 |
NA |
4 |
|
11 |
DENSO Robot Controller |
RC5-SBA |
NA |
2 |
|
12 |
MKS
MFVA23C026AAA Mass Flow Verifier πMFV |
MFVA23C026AAA |
|
1 |
|
13 |
MKS
PRESSURE CONTROLLER |
640A-26197 |
0190-19522 |
2 |
|
14 |
MFC(SURFACE MOUMTED) |
Horiba stec Z500 |
NA |
6 |
|
15 |
MKS
Baratron Pressure Transducer 100PSIG |
MKS
872B12PMD2MT1 |
|
5 |
|
16 |
INSERT, CHAMBER INLET, 5 ZONE |
Qtz |
0200-89005-003-662 |
2 |
|
17 |
SMC
IN587-04-A Gas Panel Communication Box
|
VV100-49-X8 |
|
1 |
|
18 |
Parker VERIFLO VALVE 45800877 MODEL
SM930LP1NCS202 |
VERIFLO VALVE 45800877 MODEL SM930LP1NCS202
|
3870-00574 |
30 |
|
19 |
Parker Veriflo SM930MS102CK Surface-Mount
2-Port Diaphragm Valve |
Parker Veriflo SM930MS102CK Surface-Mount
2-Port Diaphragm Valve |
|
5 |
|
20 |
Lam
Quartz Base Ring |
Qtz |
716-037793-002-B |
15 |
|
21 |
Lam
Ceramic Coupling Ring |
ceramic |
716-040737-402 REV. B |
20 |
|
22 |
Lam,Ring |
Qtz |
716-017581-002-C |
20 |
|
23 |
Lam
Teflon Ring |
teflon |
713-025164-002 B |
20 |
|
24 |
Ultra clean oven |
Thermo Scientific 3497M-1 |
|
1 |
|
25 |
EBARA DRY PUMP(Refuebished) |
A30W |
|
2 |
|
26 |
Alcatel oil free dry pump |
Adixen ACP40 |
|
1 |
|
27 |
KASHIYAMW DRY PUMP |
SDE2003 BH |
|
14 |
|
28 |
AMAT,ASSEMBLY PCB MAINFRAME INTERLOCK 1
RELAY |
|
0190-02362 |
1 |
|
29 |
AMAT,ASSEMBLY PCB MAINFRAME INTERLOCK 2
RELAY |
|
0190-02363 |
1 |
|
30 |
AMAT,ASSEMBLY PCB MAINFRAME INTERLOCK 3
RELAY |
|
0190-24338 REV001 |
1 |
|
31 |
AMAT,ASSEMBLY PCB W/5TH CH OP LOADLOCK
INTERFACE B2 C-ACP |
|
0090-04239 REV003 |
1 |
|
32 |
AMAT,ASSEMBLY PCB MAINFRAME INTERFACE C-AP |
|
0090-01810 REV002 |
1 |
|
33 |
AMAT, MF/IO Controller B2 C-ACP W/Power
Supply |
|
0090-04411 |
1 |
|
34 |
AMAT 300mm SLT ECS |
|
0010-17111 |
1 |
|
35 |
AMAT 300mm SLT ECS |
|
0010-24456 |
1 |
|
36 |
300mm 17 point Sensarray TC Wafer
|
one used and one new |
1530B-12-5000 |
2 |
|
37 |
ADCS
chemical refill system process tank |
ADCS--TEOP |
|
1 |
